Title :
Firmware complex for the acoustic diagnostic of line defects in semiconductors
Author :
Orlov, A.M. ; Scvortsov, A.A. ; Solov´ev, A.A. ; Astashin, M.P.
Author_Institution :
Ulyanovsk State Univ., Russia
Abstract :
Most modern integrated circuits and semiconductor devices experience strong current loads. This leads to the creation of areas of local heating and high temperature gradients. High currents and thermal expansion promote the formation of point and line defects both in the bulk and on the surface of the semiconductor. Moreover, the long-term current effects can result in breakaway and motion of line defects. This situation is accompanied by an acoustic emission (AE), the monitoring of which allows in situ investigation of the mechanical properties of materials and the study of the physical nature of durability and plasticity. Therefore, the purpose of this work is the construction and approbation of a firmware complex for the acoustic diagnostic of line defects in semiconductors
Keywords :
acoustic emission; acoustic emission testing; firmware; flaw detection; integrated circuit measurement; integrated circuit testing; semiconductor device measurement; semiconductor device testing; thermal management (packaging); thermal stress cracking; IC current loads; acoustic diagnostics; acoustic emission; bulk defects; defect breakaway; defect motion; durability; firmware complex; local heating; material property investigation; mechanical properties; plasticity; point defects; semiconductor device line defects; surface defects; temperature gradients; thermal expansion; Acoustic devices; Acoustic emission; Heating; Mechanical factors; Microprogramming; Monitoring; Semiconductor devices; Semiconductor materials; Temperature; Thermal expansion;
Conference_Titel :
Modern Techniques and Technology, 2001. MTT 2001. Proceedings of the 7th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists
Conference_Location :
Tomsk
Print_ISBN :
0-7803-6346-9
DOI :
10.1109/MTT.2001.983695