Title :
Spectral-domain interferometry for simultaneous measuring the refractive index and thickness
Author :
Dyankov, G. ; Liu, Chih-Shang ; Chuang, Kai-Ping
Author_Institution :
Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu
Abstract :
A new method for real-time and simultaneous measuring the refractive index and thickness of thin films is proposed. The method is based on spectral dependence of phase-shifting on reflection at one of film´s surface. The measurement consists in localizing pi-phase shift observed in a channel spectrum.
Keywords :
birefringence; light reflection; phase shifting interferometry; polymer films; refractive index; refractive index measurement; spectral-domain analysis; thickness measurement; thin films; channel spectrum; phase-shifting; pi-phase shift; refractive index; spectral domain interferometry; thickness; thin films; Interferometry; Optical films; Optical reflection; Optical refraction; Optical surface waves; Polymer films; Refractive index; Substrates; Thickness measurement; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391285
