• DocumentCode
    2241682
  • Title

    A New Probe with Diffraction Based Displacement Sensing

  • Author

    Kim, Byungki

  • Author_Institution
    Dept. of Mech. Eng., Massachusetts Univ., Lowell, MA
  • fYear
    2007
  • fDate
    26-31 Aug. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A new contacting probe is presented to measure the topography of samples in micro/nano scale. The displacement of the probe is monitored by a photodetector, which receives a diffracted beam from the probe. Analysis results of the probe, which are based on the scalar diffraction theory, are discussed.
  • Keywords
    atomic force microscopy; diffraction gratings; optical sensors; photodetectors; probes; surface topography measurement; contacting probe; diffraction based displacement sensing; photodetector; scalar diffraction theory; Atomic force microscopy; Atomic measurements; Biomembranes; Detectors; Diffraction gratings; Electrodes; Force measurement; Photodetectors; Probes; Surfaces;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-4244-1173-3
  • Electronic_ISBN
    978-1-4244-1174-0
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2007.4391291
  • Filename
    4391291
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2241682