Title :
A New Probe with Diffraction Based Displacement Sensing
Author_Institution :
Dept. of Mech. Eng., Massachusetts Univ., Lowell, MA
Abstract :
A new contacting probe is presented to measure the topography of samples in micro/nano scale. The displacement of the probe is monitored by a photodetector, which receives a diffracted beam from the probe. Analysis results of the probe, which are based on the scalar diffraction theory, are discussed.
Keywords :
atomic force microscopy; diffraction gratings; optical sensors; photodetectors; probes; surface topography measurement; contacting probe; diffraction based displacement sensing; photodetector; scalar diffraction theory; Atomic force microscopy; Atomic measurements; Biomembranes; Detectors; Diffraction gratings; Electrodes; Force measurement; Photodetectors; Probes; Surfaces;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391291
