DocumentCode
2242771
Title
Theory of the thin film gas sensor design
Author
Brynzari, V. ; Dmitriev, S. ; Korotchenkov, G.
Author_Institution
Lab. of Microelectron., Tech. Univ., Chisinau, Moldova
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
983
Abstract
A theory for calculations of the basic characteristics of a thin film gas sensor using the example of the SnO2 surface interaction with CO impurity in the atmosphere is proposed. Based on balance equations for gas particles on the semiconductor surface, the degree of filling in of a surface and the surface potential and gas sensitivity were calculated. Also, the calculation for temperature dependence of the gas sensitivity was carried out
Keywords
chemisorption; gas sensors; semiconductor materials; semiconductor thin films; surface potential; tin compounds; CO; CO impurity; SnO2; SnO2 surface interaction; atmosphere; balance equations; gas particles; gas sensitivity; semiconductor surface; surface potential; temperature dependence; thin film gas sensor design; Atmosphere; Conductive films; Conductivity; Filling; Gas detectors; Integral equations; Microelectronics; Semiconductor films; Semiconductor thin films; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635299
Filename
635299
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