Title :
Theory of the thin film gas sensor design
Author :
Brynzari, V. ; Dmitriev, S. ; Korotchenkov, G.
Author_Institution :
Lab. of Microelectron., Tech. Univ., Chisinau, Moldova
Abstract :
A theory for calculations of the basic characteristics of a thin film gas sensor using the example of the SnO2 surface interaction with CO impurity in the atmosphere is proposed. Based on balance equations for gas particles on the semiconductor surface, the degree of filling in of a surface and the surface potential and gas sensitivity were calculated. Also, the calculation for temperature dependence of the gas sensitivity was carried out
Keywords :
chemisorption; gas sensors; semiconductor materials; semiconductor thin films; surface potential; tin compounds; CO; CO impurity; SnO2; SnO2 surface interaction; atmosphere; balance equations; gas particles; gas sensitivity; semiconductor surface; surface potential; temperature dependence; thin film gas sensor design; Atmosphere; Conductive films; Conductivity; Filling; Gas detectors; Integral equations; Microelectronics; Semiconductor films; Semiconductor thin films; Thin film sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635299
