Title :
Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation
Author :
Tamaki, Jun ; Shimanoe, Kengo ; Yamada, Yoshihiro ; Yamamoto, Yoshifumi ; Miura, Norio ; Yamazoe, Noboru
Author_Institution :
Dept. of Chem., Ritsumeikan Univ., Kyoto, Japan
Abstract :
Thin films of SnO2 and CuO-SnO2 were prepared by evaporation from tin and copper metals under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains contacted to each other three-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO was very sensitive to H2S in air, being able to detect dilute H2 S close to 0.02 ppm at 300°C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film
Keywords :
atomic force microscopy; copper compounds; crystal microstructure; gas sensors; hydrogen compounds; p-n heterojunctions; semiconductor growth; semiconductor materials; semiconductor thin films; tin compounds; vapour deposited coatings; 1 torr; 300 degC; AFM; CuO-SnO2; H2S; SnO2; SnO2 grains; air atmosphere; copper metal; copper oxide-tin oxide thin film; dilute H2S; dilute hydrogen sulfide sensing properties; discrete clusters; evaporated films; high sensitivity; large mesopores; low-pressure evaporation; microstructure; n-type SnO2; p-type CuO; three-dimensional; tin metal; Atmosphere; Chemical sensors; Copper; Gas detectors; Hydrogen; Microstructure; Semiconductor films; Sensor phenomena and characterization; Tin; Transistors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635301
