Title :
Enhanced light emission from InP substrate with nanoholes
Author :
Jung, Mi ; Lee, Seok ; Byun, Young Tae ; Jhon, Young Min ; Kim, Sun Ho ; Mho, Sun-il ; Woo, Deok Ha
Author_Institution :
Div. of Intell. Syst. Res.., Korea Inst. of Sci. & Technol., Seoul
Abstract :
We observed a significant enhancement in the light output from nanoholes on InP substrate covered with nanoporous alumina mask. The substrate was exposed in ambient gases by inductively coupled plasma reactive ion etching. Photoluminescence (PL) spectra of the substrate with alumina mask showed 4 times enhanced signal compared with that of a raw InP substrate.
Keywords :
III-V semiconductors; alumina; indium compounds; masks; nanostructured materials; photoluminescence; sputter etching; substrates; Al2O3; InP; inductively coupled plasma reactive ion etching; light emission; light output enhancement; nanoholes; nanoporous alumina mask; photoluminescence spectra; substrate; Etching; Gases; Indium phosphide; Nanoporous materials; Nanoscale devices; Photoluminescence; Plasma applications; Plasma temperature; Semiconductor materials; Substrates;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391343
