Title :
Fabrication of Thin Film Titania with Nanopoles and Nanopipes
Author :
Her, Hyun-Jung ; Baek, Woon-Hyuk ; Kim, Jaewan ; Choi, Y.J. ; Kang, C.J. ; Kim, Yong-Sang
Author_Institution :
Dept. ofNano Sci. & Eng., Myongji Univ., Gyeonggi
Abstract :
We demonstrate a formation of thin film titania (TiO2) with dense array of nanopores, nanopoles, and nanopipes. The heights of pores, poles and pipes are about 130 nm, 180 nm, 200 nm, respectively. The aspect ratio of these three structures is approximated between 2 and 3.
Keywords :
nanolithography; nanoporous materials; optical fabrication; optical films; optical materials; photovoltaic cells; soft lithography; titanium compounds; TiO2; aspect ratio; effective surface area; nanoimprint lithography; nanopipes; nanopole arrays; nanopoles; photovoltaic cell; thin film titania fabrication; Fabrication; Indium tin oxide; Nanolithography; Nanoporous materials; Nanostructured materials; Semiconductor materials; Semiconductor thin films; Substrates; Transistors; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391347
