DocumentCode
2243050
Title
Fabrication of Thin Film Titania with Nanopoles and Nanopipes
Author
Her, Hyun-Jung ; Baek, Woon-Hyuk ; Kim, Jaewan ; Choi, Y.J. ; Kang, C.J. ; Kim, Yong-Sang
Author_Institution
Dept. ofNano Sci. & Eng., Myongji Univ., Gyeonggi
fYear
2007
fDate
26-31 Aug. 2007
Firstpage
1
Lastpage
2
Abstract
We demonstrate a formation of thin film titania (TiO2) with dense array of nanopores, nanopoles, and nanopipes. The heights of pores, poles and pipes are about 130 nm, 180 nm, 200 nm, respectively. The aspect ratio of these three structures is approximated between 2 and 3.
Keywords
nanolithography; nanoporous materials; optical fabrication; optical films; optical materials; photovoltaic cells; soft lithography; titanium compounds; TiO2; aspect ratio; effective surface area; nanoimprint lithography; nanopipes; nanopole arrays; nanopoles; photovoltaic cell; thin film titania fabrication; Fabrication; Indium tin oxide; Nanolithography; Nanoporous materials; Nanostructured materials; Semiconductor materials; Semiconductor thin films; Substrates; Transistors; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location
Seoul
Print_ISBN
978-1-4244-1173-3
Electronic_ISBN
978-1-4244-1174-0
Type
conf
DOI
10.1109/CLEOPR.2007.4391347
Filename
4391347
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