• DocumentCode
    2243113
  • Title

    Effect of nitride passivation on the Si nanocluster-Er coupling and Er optical activity

  • Author

    Yang, Moon-Seung ; Kim, Kyung-Joong ; Shin, Jung H.

  • Author_Institution
    Dept. of Phys., KAIST, Daejeon
  • fYear
    2007
  • fDate
    26-31 Aug. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have investigated the Er3+ photoluminescence (PL) properties from Er doped Si-rich Si nitride (SRSN) films. Based on a comparison with Er doped Si-rich Si oxide (SRSO) films, breaking of nc-Si / Er coupling and Er deactivation in Er doped SRSN film are strongly reduced. We suggest that SRSN can be an effective alternative to SRSO for obtaining efficient Er activity.
  • Keywords
    erbium; passivation; photoluminescence; silicon compounds; Er deactivation; Si nanocluster-Er coupling; SiN:Er; SiO:Er; nitride films; nitride passivation; optical activity; photoluminescence; Annealing; Erbium; Luminescence; Optical coupling; Optical films; Passivation; Photonics; Semiconductor films; Silicon; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-4244-1173-3
  • Electronic_ISBN
    978-1-4244-1174-0
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2007.4391350
  • Filename
    4391350
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2243113