Title :
Effect of nitride passivation on the Si nanocluster-Er coupling and Er optical activity
Author :
Yang, Moon-Seung ; Kim, Kyung-Joong ; Shin, Jung H.
Author_Institution :
Dept. of Phys., KAIST, Daejeon
Abstract :
We have investigated the Er3+ photoluminescence (PL) properties from Er doped Si-rich Si nitride (SRSN) films. Based on a comparison with Er doped Si-rich Si oxide (SRSO) films, breaking of nc-Si / Er coupling and Er deactivation in Er doped SRSN film are strongly reduced. We suggest that SRSN can be an effective alternative to SRSO for obtaining efficient Er activity.
Keywords :
erbium; passivation; photoluminescence; silicon compounds; Er deactivation; Si nanocluster-Er coupling; SiN:Er; SiO:Er; nitride films; nitride passivation; optical activity; photoluminescence; Annealing; Erbium; Luminescence; Optical coupling; Optical films; Passivation; Photonics; Semiconductor films; Silicon; Temperature sensors;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391350
