Title :
Applications of nanoimprinting technique in photonic devices
Author :
Guo, L. Jay ; Chao, Chungyen ; Cheng, Xing ; Hong, Yongtaek ; Kanicki, Jerzy
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Nanoimprinting is an emerging nanolithography technique, which not only has the ability to pattern nanoscale features, but also is compatible with polymer material processing. Based on these characteristics, we have extended nanoimprinting to two new applications in polymer based photonic and optoelectronic devices, namely polymer microring waveguide device and pixelated polymer light emitting diodes. Fabrication details for both types of devices are described.
Keywords :
nanolithography; optical fabrication; optical polymers; optical waveguides; organic light emitting diodes; microring waveguide; nanoimprinting; nanolithography; nanoscale features; optoelectronic devices; photonic devices; pixelated polymer LED; polymer material processing; Nanolithography; Nanoscale devices; Nonlinear optics; Optical device fabrication; Optical polymers; Optical resonators; Optical ring resonators; Optical scattering; Optical waveguides; Organic light emitting diodes;
Conference_Titel :
Nanotechnology, 2002. IEEE-NANO 2002. Proceedings of the 2002 2nd IEEE Conference on
Print_ISBN :
0-7803-7538-6
DOI :
10.1109/NANO.2002.1032111
