• DocumentCode
    2243501
  • Title

    An high precision interferometric system for nanodeplacement measurements

  • Author

    Topcu, Satilmis ; Wallerand, J.-P. ; Chassagne, L. ; Junca, P. ; Alayli, Y.

  • Author_Institution
    Lab. LIRIS, Versailles Univ., France
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    41
  • Lastpage
    43
  • Abstract
    This paper presents the principle of an air wavelength standard for high accuracy length metrology. According to the definition of the metre, nanometric accuracy by interferometric measurement techniques can be reached only for measurements made under vacuum or by taking into account the fluctuations of the refractive index of air. We have developed a new type of laser source whose wavelength is insensitive to slow fluctuations of the refractive index of air. We now have adapted this source to a commercial interferometric system working at 633 nm. Length variation measurements in air have been made. Results show that the wavelength of our source is insensitive to slow variations of the refractive index of air at a level of 10-8, giving the possibility of making distance measurements in air without the need to make any index correction.
  • Keywords
    displacement measurement; distance measurement; length measurement; light interferometry; measurement by laser beam; measurement standards; measurement systems; refractive index; 633 nm; air refractive index fluctuations; air wavelength standards; distance measurements; fluctuation insensitive laser source; high precision interferometric systems; interferometric measurement technique nanometric accuracy; laser wavelength; length metrology; length variation measurements; measurements under vacuum; nanodisplacement measurements; refractive index correction; Fluctuations; Frequency; Laser stability; Laser transitions; Length measurement; Optical interferometry; Optical refraction; Refractive index; Tunable circuits and devices; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2002. IEEE-NANO 2002. Proceedings of the 2002 2nd IEEE Conference on
  • Print_ISBN
    0-7803-7538-6
  • Type

    conf

  • DOI
    10.1109/NANO.2002.1032119
  • Filename
    1032119