DocumentCode
2243726
Title
Slot waveguide cavities for electrically-pumped silicon-based light sources
Author
Preston, Kyle ; Robinson, Jacob T. ; Lipson, Michal
Author_Institution
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
We fabricate horizontal slot waveguides and resonators using layers of polycrystalline and single crystalline silicon. We demonstrate waveguide propagation losses of 7.3 dB/cm and ring resonators with an intrinsic quality factor of 76,000.
Keywords
Q-factor; elemental semiconductors; light sources; optical fabrication; optical losses; optical resonators; optical waveguides; silicon; Si; electrically-pumped silicon-based light sources; horizontal slot waveguides; polycrystalline silicon; quality factor; ring resonators; single crystalline silicon; slot waveguide cavities; waveguide propagation losses; Crystalline materials; Crystallization; Light sources; Optical resonators; Optical ring resonators; Optical waveguides; Q factor; Refractive index; Scanning electron microscopy; Silicon; (130.3120) Integrated optical devices; (130.3130) Integrated optics materials; (230.5750) Resonators;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4571774
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