Title :
Low loss Si-SiO2-Si 8nm slot waveguides
Author :
Pafchek, R.M. ; Li, J. ; Tummidi, R.S. ; Koch, T.L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Lehigh Univ., Bethlehem, PA
Abstract :
Quasi-TM-mode propagation loss of 1.83 dB/cm at lambda = 1.565 mum is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3 nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ~ 3x105.
Keywords :
amorphous semiconductors; elemental semiconductors; integrated optics; optical fabrication; optical loss measurement; optical resonators; optical testing; optical waveguides; silicon; silicon compounds; silicon-on-insulator; Q-factor; Si-SiO2-Si; low-loss slot waveguides; quasiTM-mode propagation loss; ring resonator; silicon-on-insulator; slot fabrication; waveguide loss measurement; wavelength 1.565 mum; Dielectric losses; Etching; Loss measurement; Optical losses; Optical modulation; Optical ring resonators; Optical scattering; Optical sensors; Optical waveguides; Propagation losses; (130.2790) Guided Waves; (130.3130) Integrated OpticMaterials;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
