Title :
Integrated MEMS for pressure transponder
Author :
Kim, Heonhwan ; Chun, Kukjin
Author_Institution :
Dept. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
We propose the integrated MEMS technology for the purpose of pressure telemetry. This consists of the digitized pressure sensor, micro mechanical switch and interface circuit. The micro mechanical switch is used for the power saving, which is closed when external rf signal is applied. The digitized pressure sensor is a capacitive type sensor which has a sensing capacitor and 8 conversion capacitors and is read out by the interface circuit integrated on the same chip. The interface circuit contains the control clock generation circuit, weight making circuit and output stage. The integrated MEMS was fabricated and the fabricated micro mechanical switch has 43 V of threshold voltage and 100 Ω of ON resistance
Keywords :
capacitance measurement; electric sensing devices; microsensors; pressure sensors; telemetry; 100 ohm; 43 V; ON resistance; capacitive type sensor; control clock generation circuit; conversion capacitors; digitized pressure sensor; external rf signal; integrated MEMS; interface circuit; micro mechanical switch; output stage; power saving; pressure telemetry; pressure transponder; threshold voltage; weight making circuit; Capacitive sensors; Clocks; Integrated circuit technology; Mechanical sensors; Micromechanical devices; Switched capacitor circuits; Switches; Switching circuits; Telemetry; Transponders;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635356
