Fishbone architecture: an equivalent mechanical model of cochlea and its application to sensors and actuators

By focusing on the sophisticated functions of the mammalian cochlea, we are aiming to apply its resonator array structure to highly efficient smart sensors and actuators. In this paper, we propose an equivalent mechanical model named “fishbone architecture” which is easily realized by Si micromachining. Applications of the architecture to a sensor-artificial basilar membrane (BM) microphone (ABMM)-and an actuator-“giant impulse generator”-are proposed and examined by FEM analyses. The fabrication process and experimental results of the Si device are shown