Title :
Magnetically-excited flexural plate wave device
Author :
Butler, M.A. ; Martin, S.J. ; Spates, J.J. ; Mitchell, M.A.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Novel devices have been designed, fabricated, and tested that use the Lorentz force to excite flexural plate waves in a silicon nitride membrane. Single and dual port devices have been fabricated and the excitation spectra measured. Eigenmodes of the membrane are excited in this resonant device and non-linear effects, due to amplitude stiffening of the membrane, are observed. The effects of temperature and ambient gas on resonant frequency and Q have been explored. These devices have the advantage of material compatibility with silicon process technology and are capable of operating at very high temperatures
Keywords :
Q-factor; acoustic resonators; acoustic transducers; magnetoacoustic effects; membranes; micromechanical resonators; silicon compounds; Lorentz force; Q; Si; Si process technology compatibility; Si substrate; SiN membrane; SiN-Si; ambient gas effect; amplitude stiffening; dual port devices; excitation spectra; magnetically-excited flexural plate wave device; meander-line transducer; membrane eigenmodes; nonlinear effects; resonant frequency; single port devices; temperature effect; very high temperature operation; Biomembranes; Lorentz covariance; Magnetic devices; Magnetic fields; Magnetic resonance; Magnetic sensors; Residual stresses; Resonant frequency; Silicon; Transducers;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635361
