Title :
UV-Illuminated Buried-Type Optical Waveguide Devices on Benzocyclobutene
Author :
Chen, Liang-Yin ; Tsai, Wan-Shao ; Wang, Way-Seen
Author_Institution :
Graduate Inst. of Electro-Opt. Eng., Taipei
Abstract :
Buried-type benzocyclobutene optical devices fabricated by UV-illumination are presented. The refractive index can be accurately controlled between 0.001 and 0.0038 by the proposed method. Experimental results show directional couplers and 1times2 multimode interference power splitters can be fabricated with high accuracy and good controllability.
Keywords :
optical beam splitters; optical directional couplers; optical fabrication; optical polymers; optical waveguides; refractive index; 1x2 multimode interference power splitters; benzocyclobutene; buried-type optical waveguide devices; directional couplers; refractive index; Controllability; Directional couplers; Interference; Optical devices; Optical films; Optical polymers; Optical refraction; Optical variables control; Optical waveguides; Refractive index;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391412
