Linear ultrasonic motors using surface acoustic waves mechanical model for energy transfer

This paper presents the theory, simulation results and experimental study of the slider displacement at nanometer scale in linear ultrasonic motors using Lamb and Rayleigh waves. To our knowledge, this is the first attempt for describing the energy transfer from the acoustic wave to the slider. The model shows that the mechanism is sequential with alternative phases of levitation and contact with step-like behavior of the slider velocity. To validate the model, ultrasonic motors using Lamb and Rayleigh waves were fabricated with 10 and 20 MHz frequencies respectively. The measured displacement varies from several nanometers to several centimeters. Comparison between experimental and theoretical results shows good agreement