Simulation of integrated electromagnetic device systems

Author

Romanowicz, B. ; Lerch, Ph. ; Renaud, Ph ; Fullin, E. ; de Coulon, Y.

Author_Institution

Inst. of Microsyst., Swiss Federal Inst. of Technol., Lausanne, Switzerland

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1051

Abstract

The simulation of integrated electromagnetic sensors and actuators can be performed in conjunction with the electronics to simulate a complete microsystem. A reluctant micro-relay and an inductive displacement sensor are characterized using finite elements. Macro-models using extracted parameters are coded with analog hardware description languages for circuit simulators, with the goal of global system simulation and optimization. The methodology is applicable to all integrated and hybrid transducers which can be modeled using a discrete variable formulation

Keywords

SPICE; circuit analysis computing; digital simulation; displacement measurement; electromagnetic devices; finite element analysis; hardware description languages; magnetic sensors; microactuators; microsensors; relays; SPICE; analog hardware description languages; circuit simulators; discrete variable formulation; electromagnetic actuators; electromagnetic sensors; finite elements; global system simulation; hybrid transducers; inductive displacement sensor; integrated electromagnetic device systems; macromodels; microsystem; optimization; reluctant micro-relay; simulation; Actuators; Circuit simulation; Contacts; Electromagnetic devices; Hardware design languages; Magnetic circuits; Magnetic sensors; Microrelays; SPICE; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635370

Filename

635370