Title :
Simulation of integrated electromagnetic device systems
Author :
Romanowicz, B. ; Lerch, Ph. ; Renaud, Ph ; Fullin, E. ; de Coulon, Y.
Author_Institution :
Inst. of Microsyst., Swiss Federal Inst. of Technol., Lausanne, Switzerland
Abstract :
The simulation of integrated electromagnetic sensors and actuators can be performed in conjunction with the electronics to simulate a complete microsystem. A reluctant micro-relay and an inductive displacement sensor are characterized using finite elements. Macro-models using extracted parameters are coded with analog hardware description languages for circuit simulators, with the goal of global system simulation and optimization. The methodology is applicable to all integrated and hybrid transducers which can be modeled using a discrete variable formulation
Keywords :
SPICE; circuit analysis computing; digital simulation; displacement measurement; electromagnetic devices; finite element analysis; hardware description languages; magnetic sensors; microactuators; microsensors; relays; SPICE; analog hardware description languages; circuit simulators; discrete variable formulation; electromagnetic actuators; electromagnetic sensors; finite elements; global system simulation; hybrid transducers; inductive displacement sensor; integrated electromagnetic device systems; macromodels; microsystem; optimization; reluctant micro-relay; simulation; Actuators; Circuit simulation; Contacts; Electromagnetic devices; Hardware design languages; Magnetic circuits; Magnetic sensors; Microrelays; SPICE; Transducers;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635370
