Title :
Demonstration of an electronic photonic integrated circuit in a commercial scaled bulk CMOS process
Author :
Orcutt, Jason S. ; Khilo, Anatol ; Popovic, Milos A. ; Holzwarth, Charles W. ; Moss, Benjamin ; Li, Hanqing ; Dahlem, Marcus S. ; Bonifield, Thomas D. ; Kartner, Franz X. ; Ippen, Erich P. ; HOyt, Judy L. ; Ram, Rajeev J. ; Stojanovic, Vladimir
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA
Abstract :
We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.
Keywords :
CMOS integrated circuits; integrated optics; commercial scaled bulk CMOS process; dense photonic integration; electronic photonic integrated circuit; high-performance microprocessor electronics; photonic chip; scalable post-processing; size 65 nm; standard process layers; CMOS process; Filter bank; Integrated circuit interconnections; Optical filters; Optical losses; Optical ring resonators; Optical waveguides; Photonic integrated circuits; Silicon; Testing; (200.4650) Optical interconnects; (230.7370) Waveguides; (250.5300) Photonic integrated circuits;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
