DocumentCode
2245400
Title
Advances in High-Pulse Energy Excimer Laser and Applications
Author
Chang, Andrew ; Paetzel, Rainer ; Herbst, Ludolf ; Fechner, Burkhard
Author_Institution
Coherent, Inc., Santa Clara, CA
fYear
2007
fDate
26-31 Aug. 2007
Firstpage
1
Lastpage
2
Abstract
Pulsed excimer lasers offer a unique combination of high pulse energy and short pulse duration in the UV wavelengths. These characteristics combine to provide an exceptional photonics tool for the commercialization of novel applications such as pulsed laser deposition in thin-film manufacturing, LTPS annealing in FPD, surface hardening in automotive, and direct patterning in advanced packaging markets.
Keywords
excimer lasers; laser materials processing; UV wavelengths; high pulse energy; high-pulse energy excimer laser; photonics tool; pulsed excimer lasers; short pulse duration; Annealing; Automotive engineering; Commercialization; Laser applications; Manufacturing; Optical pulses; Photonics; Pulsed laser deposition; Sputtering; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location
Seoul
Print_ISBN
978-1-4244-1173-3
Electronic_ISBN
978-1-4244-1174-0
Type
conf
DOI
10.1109/CLEOPR.2007.4391449
Filename
4391449
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