Title :
Parallel laser microfabrication of three-dimensional structures corrected for optical aberrations
Author :
Salter, Patrick ; Jesacher, Alexander ; Simmonds, Richard ; Booth, Martin
Author_Institution :
Dept. of Eng. Sci., Univ. of Oxford, Oxford, UK
Abstract :
An adaptive optical element is employed to generate multiple fabrication spots while also compensating for any optical aberration present in the system. We present rapid diffraction limited optical fabrication in a range of interesting substrates.
Keywords :
aberrations; adaptive optics; holography; laser materials processing; micro-optics; microfabrication; optical fabrication; adaptive optical element; diffraction limited optical fabrication; multiple fabrication spots; optical aberrations; parallel laser microfabrication; three-dimensional structures; Adaptive optics; Holographic optical components; Holography; Optical device fabrication; Optical diffraction; Optical variables control;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
