Structural and Thermal Analysis of a Thermally Actuated Polymer Micro Robotic Gripper

Author

Liu, Zhihua ; Wei, Yangjie ; Chan, Ho-Yin ; Li, Wen Jung ; Dong, Zaili ; Wang, Yuechao

Author_Institution

Shenyang Inst. of Autom., Chinese Acad. of Sci., Liaoning

fYear

2004

fDate

22-26 Aug. 2004

Firstpage

470

Lastpage

473

Abstract

This paper describes the structural and thermal modeling of a thermally actuated polymer micro robotic gripper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by parylene C polymer layers. Due to the large difference of thermal expansion coefficients between different structural layers, the actuator can be actuated with much larger deflections than conventional MEMS actuators. In this paper, we presented a finite-element modeling of thermal transient response and the thermo-mechanical coupling behavior of the polymer MEMS gripper

Keywords

actuators; finite element analysis; grippers; micromanipulators; polymers; thermal analysis; MEMS microgripper; finite-element modeling; parylene C polymer layers; platinum metal heater; polymer MEMS gripper; structural analysis; thermal analysis; thermal transient response; thermally actuated polymer micro robotic gripper; thermomechanical coupling; trimorph thermal actuator; Actuators; Finite element methods; Grippers; Micromechanical devices; Platinum; Polymers; Robots; Thermal expansion; Thermomechanical processes; Transient response; MEMS microgripper; micro themal actuator; polymer MEMS actuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Biomimetics, 2004. ROBIO 2004. IEEE International Conference on

Conference_Location

Shenyang

Print_ISBN

0-7803-8614-8

Type

conf

DOI

10.1109/ROBIO.2004.1521824

Filename

1521824