Title :
Structural and Thermal Analysis of a Thermally Actuated Polymer Micro Robotic Gripper
Author :
Liu, Zhihua ; Wei, Yangjie ; Chan, Ho-Yin ; Li, Wen Jung ; Dong, Zaili ; Wang, Yuechao
Author_Institution :
Shenyang Inst. of Autom., Chinese Acad. of Sci., Liaoning
Abstract :
This paper describes the structural and thermal modeling of a thermally actuated polymer micro robotic gripper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by parylene C polymer layers. Due to the large difference of thermal expansion coefficients between different structural layers, the actuator can be actuated with much larger deflections than conventional MEMS actuators. In this paper, we presented a finite-element modeling of thermal transient response and the thermo-mechanical coupling behavior of the polymer MEMS gripper
Keywords :
actuators; finite element analysis; grippers; micromanipulators; polymers; thermal analysis; MEMS microgripper; finite-element modeling; parylene C polymer layers; platinum metal heater; polymer MEMS gripper; structural analysis; thermal analysis; thermal transient response; thermally actuated polymer micro robotic gripper; thermomechanical coupling; trimorph thermal actuator; Actuators; Finite element methods; Grippers; Micromechanical devices; Platinum; Polymers; Robots; Thermal expansion; Thermomechanical processes; Transient response; MEMS microgripper; micro themal actuator; polymer MEMS actuator;
Conference_Titel :
Robotics and Biomimetics, 2004. ROBIO 2004. IEEE International Conference on
Conference_Location :
Shenyang
Print_ISBN :
0-7803-8614-8
DOI :
10.1109/ROBIO.2004.1521824
