Title :
1.5-μm-radius high-Q silicon microring resonators
Author :
Xu, Qianfan ; Fattal, David ; Beausoleil, Raymond G.
Author_Institution :
Hewlett-Packard Labs., Palo Alto, CA
Abstract :
We show cascaded silicon microring resonators with 1.5-mum radius critically coupled to a narrower waveguide. A coupled Q of 9,000 is achieved. Devices are fabricated with the widely-available SEM-based lithography system using a stitching-free design.
Keywords :
electro-optical modulation; elemental semiconductors; integrated optoelectronics; lithography; micro-optics; optical couplers; optical design techniques; optical fabrication; optical resonators; optical waveguides; scanning electron microscopy; silicon; SEM-based lithography system; Si; U-shaped waveguide; electrooptic modulators; high-Q silicon microring resonators fabrication; narrower waveguide coupling; size 1.5 mum; stitching-free design; Electrooptic modulators; Lithography; Optical resonators; Optical ring resonators; Optical scattering; Optical sensors; Optical waveguides; Resonance; Silicon; Waveguide discontinuities; (130.3120) Integrated optics devices; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
