Title :
Dispersion engineering of silicon nanophotonic wires using a thin film cladding
Author :
Green, William M J ; Liu, Xiaoping ; Chen, Xiaogang ; Assefa, Solomon ; Osgood, Richard M., Jr. ; Vlasov, Yurii A.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY
Abstract :
Numerical simulations and experiments are performed to investigate the use of thin conformal silicon nitride cladding layers to engineer the dispersion properties of silicon nanophotonic waveguides.
Keywords :
claddings; nanowires; optical dispersion; optical films; optical waveguides; semiconductor thin films; silicon compounds; wide band gap semiconductors; Si3N4; dispersion engineering; silicon nanophotonic waveguides; silicon nanophotonic wires; thin film conformal silicon nitride cladding layers; Nanoscale devices; Nonlinear optics; Numerical simulation; Optical films; Optical waveguides; Power engineering and energy; Semiconductor thin films; Silicon; Thin film devices; Wires; 130.2035 (Dispersion compensation devices); 130.3120 (Integrated optics devices);
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9