Title :
Nanotube devices fabricated in a nano laboratory
Author :
Dong, Lixin ; Arai, Fumihito ; Nakajima, Masahiro ; Liu, Pou ; Fukuda, Toshio
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
A nano laboratory-a prototype nano manufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nano laboratory.
Keywords :
carbon nanotubes; electron beam deposition; field emission electron microscopy; manipulators; manufacturing systems; measurement systems; nanotechnology; nanotube devices; real-time systems; scanning electron microscopy; 16 degrees of freedom; atomic force microscope cantilever; carbon nanotubes; electron beam deposition; external precursor evaporation reservoir; field emission scanning electron microscope; internal precursor evaporation reservoir; linear bearing; manipulators; mass flow sensor; nano laboratory; nano manufacturing system; nanofabrication system; nanorobotic manipulation system; nanotube cold cathode; nanotube device fabrication; nanotube probe; nanotube scissors; piezoresistive lever; real-time measurement system; thermal field emission electron source; Atomic force microscopy; Atomic measurements; Fabrication; Force measurement; Laboratories; Manufacturing; Nanotube devices; Prototypes; Scanning electron microscopy; Thermal force;
Conference_Titel :
Robotics and Automation, 2003. Proceedings. ICRA '03. IEEE International Conference on
Print_ISBN :
0-7803-7736-2
DOI :
10.1109/ROBOT.2003.1242152