Title :
Fabrication of Micron-scale Elliptical Structures for Vertical Optical Via Applications
Author :
Lee, M.W. ; Choi, C.H. ; Sung, J.H. ; Kim, B.S. ; Park, S.G. ; Lee, S.G. ; Lee, E.H. ; O, B.H.
Author_Institution :
OPERA, Inha Univ., Incheon
Abstract :
Previously proposed shape of the optical via structures are simple 45 degree mirrors with or without metal coatings, and simple elliptical shapes. To improve alignment tolerance and coupling efficiency, various shape of the optical via structures are fabricated and optical characteristics of the shapes are measured.
Keywords :
micro-optics; mirrors; optical interconnections; elliptical shape; micron-scale elliptical structure fabrication; mirrors; vertical optical via; Costs; High speed optical techniques; Integrated optics; Optical device fabrication; Optical losses; Optical reflection; Printed circuits; Resists; Shape measurement; Transportation;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391504
