Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching

Author

Wortmann, Dirk ; Gottmann, Jens ; Brandt, Nelli ; Horn-Solle, Herbert

Author_Institution

Lehrstuhl fur Lasertech., RWTH Aachen, Aachen

fYear

2008

fDate

4-9 May 2008

Firstpage

1

Lastpage

2

Abstract

Micro- and nanofabrication of cavities in the volume of sapphire was performed by femtosecond laser irradiation followed by chemical etching with aqueous solution of HF acid. Depending on the focusing conditions self-organized nanostructures or elliptical microchannels are produced. This manufacturing technique is potentially usable for photonic crystals in integrated optical elements or microfluidic devices for applications in life science, biology or chemistry.

Keywords

bioMEMS; etching; integrated optics; laser materials processing; microcavities; microfluidics; nanostructured materials; optical fabrication; optical materials; photonic crystals; sapphire; 3D photonic devices manufacturing; Al₂O₃; HF acid; biological applications; chemical applications; elliptical microchannels; femtosecond laser irradiation; integrated optical elements; life science applications; manufacturing technique; microfabrication; microfluidic devices; nanofabrication; photonic crystals; sapphire volume; selective chemical etching; self-organized nanostructures; Chemical lasers; Etching; Hafnium; Laser theory; Manufacturing; Microchannel; Nanofabrication; Nanostructures; Photonic crystals; Ultrafast optics; (220.4000) Microstructure fabrication; (220.4241) Nanostructure fabrication; (260.7120) Ultrafast phenomena; (320.7130) Ultrafast processes in condensed matter, including semiconductors;

fLanguage

English

Publisher

iet

Conference_Titel

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Conference_Location

San Jose, CA

Print_ISBN

978-1-55752-859-9

Type

conf

Filename

4571897