Resonance-enhanced micromechanical cantilever for mass sensing

Author

Liao, H.-S. ; Huang, K.-Y. ; Hwu, E.-T. ; Chang, C.-S.

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2010

fDate

6-9 July 2010

Firstpage

437

Lastpage

441

Abstract

Micromechanical cantilever-based mass sensors are more sensitive with the miniaturization of size. However, when the dimensions of the device reduced to nano-scale, the common optical readout is confronted by the diffraction influence. A resonance-enhanced micromechanical cantilever (REM-cantilever) is developed for mass sensing without reducing the cantilever size. The geometry of the REM-cantilever is designed for enhancing the second order resonance. Through simulation and experiment we have found out, that the second order resonant frequency is more sensitive than the first one. The sensitivity of the first and the second order resonance are -0.18 Hz/pg and -1.12 Hz/pg, respectively. The second order resonance of the REM-cantilevers can realize 6.2 times improvement in the mass sensing sensitivity. The REM-cantilevers are also suit for the other readout systems such as capacitive sensor or piezo-resistive sensor.

Keywords

cantilevers; micromechanical devices; microsensors; REM-cantilever; capacitive sensor; diffraction influence; mass sensing sensitivity; micromechanical cantilever-based mass sensors; nanoscale; optical readout; piezoresistive sensor; resonance-enhanced micromechanical cantilever; second order resonant frequency; Biomedical optical imaging; Lasers; Optical reflection; Optical sensors; Resonant frequency; Sensitivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics (AIM), 2010 IEEE/ASME International Conference on

Conference_Location

Montreal, ON

Print_ISBN

978-1-4244-8031-9

Type

conf

DOI

10.1109/AIM.2010.5695755

Filename

5695755