Title :
Micromachined heaters with 1-μs thermal time constants for AFM thermomechanical data storage
Author :
Chui, Benjamin W. ; Mamin, H. Jonathon ; Terris, Bruce D. ; Rugar, Dan ; Goodson, Kenneth E. ; Kenny, Thomas W.
Author_Institution :
Stanford Univ., CA, USA
Abstract :
Single-crystal silicon cantilevers with integrated resistive heaters have been demonstrated for use in high-density AFM thermomechanical data storage. The newest heaters exhibit thermal time constants of 1 μs and support writing at 100 kbit/s, ten times faster than before. Electrical and thermal measurements on the heaters agree with finite element analysis results. A thermodynamic model based on the cantilever´s geometry and material properties was shown to predict device behavior accurately. Cantilevers with different geometrical configurations were also tested in order to determine the optimal design
Keywords :
atomic force microscopy; digital storage; finite element analysis; micromachining; micromechanical devices; resistance heating; silicon-on-insulator; 1 mus; 100 kbit/s; AFM thermomechanical data storage; Si; cantilever geometry; electrical measurements; finite element analysis; geometrical configurations; high-density; integrated resistive heaters; material properties; micromachined heaters; optimal design; single-crystal Si cantilevers; thermal measurements; thermal time constants; thermodynamic model; writing; Electric variables measurement; Finite element methods; Memory; Predictive models; Resistance heating; Silicon; Solid modeling; Thermodynamics; Thermomechanical processes; Writing;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635387
