Title :
Large-scale 3D microporous structures by two-photon laser machining
Author :
Liu, Yihong ; Pyrak-Nolte, Laura J. ; Nolte, David D.
Author_Institution :
Dept. of Phys., Purdue Univ., West Lafayette, IN
Abstract :
We fabricate large-scale 3D microporous structures fabricated with two-photon polymerization in broad-area SU-8 photoresist. This approach enables the fabrication of microporous structures simulating complex 3D microfluidic systems.
Keywords :
high-speed optical techniques; laser beam machining; optical fabrication; photolithography; photoresists; polymerisation; porous materials; two-photon processes; 3D microfluidic systems; 3D microporous structures; SU-8 photoresist; two-photon laser machining; two-photon polymerization; Large-scale systems; Laser theory; Machining; Microfluidics; Optical device fabrication; Optical filters; Physics; Polymers; Resists; Ultrafast optics; (190.4180) Multiphoton processes; (220.3740) Lithography; (220.4000) Microstructure fabrication; (320.7160) Ultrafast technology;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
