Low-order models for fast dynamical simulation of MEMS microstructures

Author

Hung, Elmer S. ; Yang, Yao-Joe ; Senturia, Stephen D.

Author_Institution

MIT, Cambridge, MA, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1101

Abstract

In this paper, are describe how a few simulations of fully meshed dynamical problems can be used to construct efficient low-order models for system-level design of microstructures. We report on the use of this method to capture the measured behaviour of a pressure sensor based on the pull-in time of a beam. Results show that the reduced order model decreases simulation time by at least a factor of 37 while achieving good agreement with experimental data

Keywords

CAD; damping; digital simulation; dynamic response; finite element analysis; iterative methods; microsensors; partial differential equations; pressure sensors; simulation; structural engineering computing; MEMS microstructures; dynamical simulation; low-order models; meshed dynamical problems; pressure sensor; pull-in time; reduced order model; simulation time; squeeze film damping; system-level design; Damping; Electrostatics; Equations; Geometry; Mesh generation; Micromechanical devices; Microstructure; Pressure measurement; System-level design; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635392

Filename

635392