• DocumentCode
    2246965
  • Title

    Reliability evaluation of semiconductor using ultrasound

  • Author

    Jang, Hyoseong ; Ha, Job ; Jhang, Kyungyoung ; Lee, Joonhyun

  • Author_Institution
    Sonix Korea, Seoul, South Korea
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    335
  • Lastpage
    340
  • Abstract
    The semiconductor packaging industry is spending a great deal of time and effort developing thinner and thinner packages. Ultrasound works by measuring the amount of signal reflected from material interfaces. Thin packages create a potential problem because the resultant reflected signal from the die top and die attach layers can be nearly superimposed in the ultrasonic waveform. This makes it difficult to inspect for delaminations at the die attach adhesive interfaces. Generally a preconditioning test is performed to evaluate reliability of semiconductor packages. This includes utilizing a Scanning Acoustic Microscope (SAM) at the beginning and end of the test to aid in the discovery of the existence of physical defects, such as like delaminations or package cracks. In particular and of primary concern are package cracks and delaminations caused by moisture being absorbed under ambient conditions. This paper discusses the kind of failure mechanism associated with moisture absorption in plastic encapsulated semiconductors and the methodology of using SAMs to find failures such as cracks or delaminations grown during the preconditioning test
  • Keywords
    acoustic microscopy; delamination; integrated circuit packaging; integrated circuit reliability; moisture; plastic packaging; ultrasonic applications; delaminations; die attach layers; die top; moisture; package cracks; physical defects; plastic encapsulated semiconductors; preconditioning test; reliability evaluation; scanning acoustic microscope; semiconductor packaging industry; thinner packages; ultrasonic waveform; Acoustic testing; Delamination; Microassembly; Moisture; Semiconductor device packaging; Semiconductor device reliability; Semiconductor device testing; Semiconductor materials; Ultrasonic imaging; Ultrasonic variables measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Materials and Packaging, 2001. EMAP 2001. Advances in
  • Conference_Location
    Jeju Island
  • Print_ISBN
    0-7803-7157-7
  • Type

    conf

  • DOI
    10.1109/EMAP.2001.984006
  • Filename
    984006