Title :
The autonomous impact resonator: a new operation principle for a silicon resonant strain gauge
Author :
Puers, Robert ; Bienstman, Jan ; Vandewalle, Joos
Author_Institution :
Dept. ESAT, Katholieke Univ., Leuven, Belgium
Abstract :
A new oscillation principle for silicon resonators is described. Using only a capacitive microbridge, a resistor and a d.c. source, an autonomous oscillator can be obtained without the need for an external oscillator circuit. An electromechanical model is derived and a general mathematical description is given. The behaviour of the autonomous impact oscillator is simulated and a stability analysis is presented. Experimental results validate the proposed oscillation mechanism
Keywords :
bridge circuits; circuit analysis computing; circuit stability; differential equations; elemental semiconductors; micromechanical resonators; nonlinear network analysis; silicon; Si; Si resonant strain gauge; autonomous impact oscillator; autonomous impact resonator; autonomous oscillator; capacitive microbridge; d.c. source; electromechanical model; external oscillator circuit; general mathematical description; oscillation mechanism; pull in; stability analysis; Capacitive sensors; Circuits; Electrodes; Electrostatics; Mechanical sensors; Oscillators; Resistors; Resonance; Silicon; Solid modeling;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635393
