• DocumentCode
    2247191
  • Title

    Stabilization of electrostatically actuated mechanical devices

  • Author

    Seeger, Joseph I. ; Crary, Selden B.

  • Author_Institution
    Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA
  • Volume
    2
  • fYear
    1997
  • fDate
    16-19 Jun 1997
  • Firstpage
    1133
  • Abstract
    We show that the pull-in instability, which significantly limits the operation of electrostatically actuated devices, can be avoided by the simple addition of a series capacitance
  • Keywords
    MOS capacitors; capacitance; electrostatic devices; feedback; microactuators; semiconductor device models; stability; MEMS device model; MOS capacitor feedback; constant-voltage operation; controlled-voltage operation; electrostatically actuated mechanical devices; pull-in instability; series capacitance; stabilization; Capacitance; Capacitive sensors; Damping; Electrodes; Electrostatics; Force sensors; Mechanical sensors; Potential energy; Stability; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    0-7803-3829-4
  • Type

    conf

  • DOI
    10.1109/SENSOR.1997.635402
  • Filename
    635402
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2247191