Title :
Stabilization of electrostatically actuated mechanical devices
Author :
Seeger, Joseph I. ; Crary, Selden B.
Author_Institution :
Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA
Abstract :
We show that the pull-in instability, which significantly limits the operation of electrostatically actuated devices, can be avoided by the simple addition of a series capacitance
Keywords :
MOS capacitors; capacitance; electrostatic devices; feedback; microactuators; semiconductor device models; stability; MEMS device model; MOS capacitor feedback; constant-voltage operation; controlled-voltage operation; electrostatically actuated mechanical devices; pull-in instability; series capacitance; stabilization; Capacitance; Capacitive sensors; Damping; Electrodes; Electrostatics; Force sensors; Mechanical sensors; Potential energy; Stability; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635402
