Title :
Nonlinear electromechanical behaviour of an electrostatic microrelay
Author :
Gretillat, M.A. ; Yang, Y.-J. ; Hung, E.S. ; Rabinovich, V. ; Ananthasuresh, G.K. ; de Rooij, Nico F. ; Senturia, S.D.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
In this paper experiments on the quasistatic and dynamic behaviour of the electrostatic polysilicon microrelay fabricated at IMT are presented together with new nonlinear dynamical models. The models simulate the pull-in voltage, the resonance frequency, the quality factor, the switching time and the electrostatic spring softening of the microrelay. Simulation of the pull-in voltage has been done with MIT´s MEMCAD system, the resonance frequency has been simulated with Abaqus TM, while macro-models developed at MIT have been used to simulate the dynamics of the nonlinear actuator in the presence of squeeze-film damping
Keywords :
Q-factor; damping; electrostatic devices; elemental semiconductors; microactuators; modelling; resonance; semiconductor relays; silicon; Abaqus; MEMCAD system; Si; dynamic behaviour; electrostatic microrelay; electrostatic spring softening; macro-models; nonlinear actuator dynamics simulation; nonlinear dynamical models; nonlinear electromechanical behaviour; polysilicon microrelay; pull-in voltage; quality factor; quasistatic behaviour; resonance frequency; squeeze-film damping; switching time; Actuators; Electrostatics; Microrelays; Nonlinear dynamical systems; Q factor; Resonance; Resonant frequency; Softening; Springs; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635406
