Title :
Temperature dependence and drift of a thermal accelerometer
Author :
Dauderstadt, U.A. ; Sarro, P.M. ; Middelhoek, S.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Abstract :
Silicon accelerometers are increasingly used in the automotive industry, but also applications for 3D mice or so-called gesture controlled remote controls are feasible. For such applications, small, low-cost sensors are needed which do not only meet certain requirements for sensitivity, working range or response time but can also work in a large temperature range as occurs in a car. In this paper, an accelerometer is described, which is based on a thermal principle. This accelerometer works at frequencies up to 300 Hz, has an output signal of about 20 mV/g and shows very low temperature dependence and drift for a thermal device
Keywords :
accelerometers; automotive electronics; elemental semiconductors; intelligent sensors; silicon; thermopiles; -35 to 145 C; 300 Hz; 3D mice; Si; Si accelerometers; Si3N4 bridge; Si3N4-Si; automotive industry; drift; gesture controlled remote controls; output signal; response time; sensitivity; smart sensors; temperature dependence; thermal accelerometer; thermopiles; working range; Accelerometers; Automotive engineering; Delay; Frequency; Industrial control; Mice; Silicon; Temperature dependence; Temperature distribution; Temperature sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635424