Title :
A thermopneumatic microfluidic system
Author :
Grosjean, C. ; Xing Yang ; Yu-Chong Tai
Author_Institution :
Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A self-contained planar microfluidic system using thermopneumatic actuation has been demonstrated. Using a novel suspended silicon island heater fabricated by deep reactive ion etching (DRIE), and a precision machined acrylic fluidic substrate with a matching silicone rubber membrane, a self-contained system of channels, valves, and a pump has been demonstrated using air as a working fluid.
Keywords :
microfluidics; micromachining; pneumatic control equipment; sputter etching; Si; acrylic fluidic substrate; channel; deep reactive ion etching; precision machining; pump; self-contained planar microfluidic system; silicone rubber membrane; suspended silicon island heater; thermopneumatic actuation; valve; Actuators; Biomembranes; Etching; Fabrication; Heat pumps; Heat transfer; Microfluidics; Rubber; Silicon; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984051
