• DocumentCode
    2248208
  • Title

    MEMS micro-switches for use in DC, RF, and optical applications

  • Author

    Suzuki, K.

  • Author_Institution
    Functional Devices Res. Labs., NEC Corp., Ibaraki, Japan
  • fYear
    2001
  • fDate
    Oct. 31 2001-Nov. 2 2001
  • Firstpage
    48
  • Lastpage
    49
  • Abstract
    In this paper, our works on Micro Electro Mechanical Systems (MEMS) micro-switches for use in DC, RF, and optical applications are reviewed.
  • Keywords
    micro-optics; micromechanical devices; optical switches; switches; DC applications; MEMS micro-switch; RF applications; optical applications; Filters; Insertion loss; Micromechanical devices; Microrelays; Microswitches; Optical attenuators; Radio frequency; Relays; Switches; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2001 International
  • Conference_Location
    Shimane, Japan
  • Print_ISBN
    4-89114-017-8
  • Type

    conf

  • DOI
    10.1109/IMNC.2001.984062
  • Filename
    984062
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2248208