Title :
Enhanced two-photon absorption in polycrystalline silicon
Author :
Mehta, Karan ; Orcutt, Jason ; Ram, Rajeev
Author_Institution :
Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We discuss measurements of the two-photon absorption coefficient (β) in polycrystalline silicon deposited in a scaled CMOS process; measurements in thin film, waveguides and microring resonators indicate β is over two orders of magnitude larger than in crystalline silicon.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; light absorption; micro-optics; optical resonators; optical waveguides; silicon; thin films; Si; microring resonators; polycrystalline silicon; scaled CMOS process; thin film; two-photon absorption coefficient; waveguides; Amorphous silicon; Measurement by laser beam; Nonlinear optics; Optical ring resonators; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
