Title :
Silicon self-suspended resonant grating filters at telecommunication wavelength
Author :
Ye, Jia-Sheng ; Matsuyama, Naoki ; Kanamori, Yoshiaki ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai
Abstract :
A silicon self-suspended grating was fabricated using nanolithography technology. Experimental results showed that it served as an optical filter through guide mode resonance, which agreed with theoretical simulations by rigorous coupled wave method.
Keywords :
coupled mode analysis; diffraction gratings; nanolithography; optical communication equipment; optical fabrication; optical filters; silicon; guide mode resonance; nanolithography technology; optical filter; optical telecommunication wavelength; rigorous coupled wave method; silicon self-suspended resonant grating filters; theoretical simulations; Bandwidth; Etching; Fabrication; Filling; Gratings; Optical filters; Optical scattering; Reflectivity; Resonance; Silicon; 050.1950; 230.4000;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
