Robust trajectory tracking and visual servoing schemes for MEMS manipulation

This paper focuses on the automation of manipulation and assembly of microcomponents using visual feedback controls. Trajectory planning and tracking methods are proposed in order to avoid occlusions during microparts manipulation and to increase the success rate of pick-and-place manipulation cycles. The methods proposed are validated using a five degree-of-freedom (DOF) microrobotic cell including a 3 DOF mobile platform, a 2 DOF micromanipulator, a gripping system and a top-view imaging system. Promising results on accuracy and repeatability of microballs manipulation tasks are obtained and presented.