Title :
Heating element embedded parylene microcolumn for miniature gas chromatograph
Author :
Hong-seok Noh ; Hesketh, P.J. ; Frye-Mason, G.C.
Author_Institution :
George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper presents the first miniature parylene gas chromatograph (GC) column with embedded heating element. The main advantage of a parylene microcolumn is its lower heat capacity compared with a micromachined silicon/glass column. The analysis time and power consumption of the miniature GC system can be decreased with a parylene microcolumn because of its rapid transient heating. In this paper, the fabrication and heat transfer of a heating element embedded parylene microcolumn are presented.
Keywords :
chemical sensors; chromatography; heat transfer; heating elements; microsensors; polymers; temperature distribution; analysis time; embedded heating element; heat capacity; heat transfer; miniature gas chromatograph; miniature integrated chemical laboratory; parylene microcolumn; poly(mono-chloro-para-xylylene); power consumption; pressure drop; rapid transient heating; steady-state temperature data; transient temperature profile; triple layer structure; Bonding; Chemicals; Etching; Fabrication; Glass; Heating; Laboratories; Microchannel; Silicon; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984092
