DocumentCode
2249080
Title
Marching velocity of capillary meniscuses in microchannels
Author
Lung-Jieh Yang ; Tze-Jung Yao ; Yu-Lin Huang ; Yong Xu ; Yu-Chong Tai
Author_Institution
Tamkang Univ., Taiwan
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
93
Lastpage
96
Abstract
This paper describes a new method and an analytical model for characterizing the surface energy inside a microchannel using the measurement of the marching velocity of a capillary meniscus. This method is based on the fact that surface tension of a liquid meniscus in a hydrophilic case produces pressure to pull liquid into the channel and the velocity of the meniscus is related to the surface energy. Both Parylene and silicon nitride microchannels with different surface conditions were fabricated to perform the liquid-filling experiments. It is shown that our model agrees well with the data and this is a valid method.
Keywords
capillarity; surface energy; surface tension; Parylene microchannel; Si/sub 3/N/sub 4/; analytical model; capillary meniscus; hydrophilic liquid; liquid filling; marching velocity; measurement method; silicon nitride microchannel; surface energy; surface tension; Analytical models; Electric variables measurement; Energy measurement; Filling; Microchannel; Microscopy; Silicon; Solids; Surface tension; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984098
Filename
984098
Link To Document