• DocumentCode
    2249080
  • Title

    Marching velocity of capillary meniscuses in microchannels

  • Author

    Lung-Jieh Yang ; Tze-Jung Yao ; Yu-Lin Huang ; Yong Xu ; Yu-Chong Tai

  • Author_Institution
    Tamkang Univ., Taiwan
  • fYear
    2002
  • fDate
    24-24 Jan. 2002
  • Firstpage
    93
  • Lastpage
    96
  • Abstract
    This paper describes a new method and an analytical model for characterizing the surface energy inside a microchannel using the measurement of the marching velocity of a capillary meniscus. This method is based on the fact that surface tension of a liquid meniscus in a hydrophilic case produces pressure to pull liquid into the channel and the velocity of the meniscus is related to the surface energy. Both Parylene and silicon nitride microchannels with different surface conditions were fabricated to perform the liquid-filling experiments. It is shown that our model agrees well with the data and this is a valid method.
  • Keywords
    capillarity; surface energy; surface tension; Parylene microchannel; Si/sub 3/N/sub 4/; analytical model; capillary meniscus; hydrophilic liquid; liquid filling; marching velocity; measurement method; silicon nitride microchannel; surface energy; surface tension; Analytical models; Electric variables measurement; Energy measurement; Filling; Microchannel; Microscopy; Silicon; Solids; Surface tension; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7185-2
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2002.984098
  • Filename
    984098