Title :
Marching velocity of capillary meniscuses in microchannels
Author :
Lung-Jieh Yang ; Tze-Jung Yao ; Yu-Lin Huang ; Yong Xu ; Yu-Chong Tai
Author_Institution :
Tamkang Univ., Taiwan
Abstract :
This paper describes a new method and an analytical model for characterizing the surface energy inside a microchannel using the measurement of the marching velocity of a capillary meniscus. This method is based on the fact that surface tension of a liquid meniscus in a hydrophilic case produces pressure to pull liquid into the channel and the velocity of the meniscus is related to the surface energy. Both Parylene and silicon nitride microchannels with different surface conditions were fabricated to perform the liquid-filling experiments. It is shown that our model agrees well with the data and this is a valid method.
Keywords :
capillarity; surface energy; surface tension; Parylene microchannel; Si/sub 3/N/sub 4/; analytical model; capillary meniscus; hydrophilic liquid; liquid filling; marching velocity; measurement method; silicon nitride microchannel; surface energy; surface tension; Analytical models; Electric variables measurement; Energy measurement; Filling; Microchannel; Microscopy; Silicon; Solids; Surface tension; Velocity measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984098