DocumentCode
2249313
Title
Optical beam shaping by spatial light phase modulator with bidirectional tilt-piston micromirror array
Author
Yamashita, S. ; Mita, M. ; Fujita, H. ; Yamamoto, T. ; Kawai, M. ; Yano, M.
Author_Institution
Fujitsu Labs. Ltd., Tokyo
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
We have succeeded in controlling the optical beam profile by MEMS spatial light phase modulator experimentally. The modulator proposed by our group has 1-D array of bidirectional tilt-piston micromirrors driven by electrostatic force.
Keywords
micromechanical devices; micromirrors; optical arrays; spatial light modulators; bidirectional tilt-piston micromirror array; electrostatic force; optical MEMS devices; optical beam profile; optical beam shaping; spatial light phase modulator; Electrodes; Glass; Indium tin oxide; Micromirrors; Mirrors; Optical arrays; Optical beams; Optical modulation; Phase modulation; Phased arrays; (140.3300) Laser beam shaping; (230.6120) Spatial light modulators;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4572011
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