Title :
Channel waveguide formed by “One Shot” implantation of He+ ions
Author :
Ilan, Har´el ; Gumennik, Alexander ; Perepelitsa, Galina ; Israel, Abraham ; Agranat, Aharon J.
Author_Institution :
Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem
Abstract :
Channel waveguide was fabricated in a KLTN crystal. The waveguide was produced by a selective implantation of He+ ions into the crystal through a gold stopping mask, which created a trough shaped cladding.
Keywords :
helium; ion implantation; lithium compounds; optical fabrication; optical waveguides; potassium compounds; He; KLTN crystal; KLi(TaNb)O3; channel waveguide; gold stopping mask; ion implantation; trough shaped cladding; Amorphous materials; Circuits; Crystal microstructure; Crystallization; Electrooptical waveguides; Gold; Helium; Optical device fabrication; Optical waveguides; Photonic crystals; (220.4000) Microstructure fabrication; (250.3140) Integrated optoelectronic circuits;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
