• DocumentCode
    2249617
  • Title

    Nonlinear optics in silicon nitride waveguide device on silicon chip

  • Author

    Ikeda, K. ; Saperstein, R. ; Alic, N. ; Fainman, Y.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, San Diego, La Jolla, CA
  • fYear
    2008
  • fDate
    4-9 May 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Silicon nitride /silicon dioxide waveguide using plasma-enhanced chemical vapor deposition is reported, which has the loss of ~4 dB/cm. A ring resonator using the waveguide gives the Q of 12,900 and its nonlinear response is studied.
  • Keywords
    integrated optics; nonlinear optics; optical losses; optical resonators; optical waveguides; plasma CVD; silicon compounds; SiN-SiO2; integrated optics; nonlinear optics; plasma-enhanced chemical vapor deposition; ring resonator; silicon chip; silicon nitride-silicon dioxide waveguide; Chemical vapor deposition; Nonlinear optics; Optical films; Optical ring resonators; Optical waveguides; Plasma applications; Plasma waves; Resonance; Silicon compounds; Waveguide discontinuities; (130.3130) Integrated optics materials; (130.3990) Micro-optical devices;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-859-9
  • Type

    conf

  • Filename
    4572026
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2249617