Title :
Nonlinear optics in silicon nitride waveguide device on silicon chip
Author :
Ikeda, K. ; Saperstein, R. ; Alic, N. ; Fainman, Y.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, San Diego, La Jolla, CA
Abstract :
Silicon nitride /silicon dioxide waveguide using plasma-enhanced chemical vapor deposition is reported, which has the loss of ~4 dB/cm. A ring resonator using the waveguide gives the Q of 12,900 and its nonlinear response is studied.
Keywords :
integrated optics; nonlinear optics; optical losses; optical resonators; optical waveguides; plasma CVD; silicon compounds; SiN-SiO2; integrated optics; nonlinear optics; plasma-enhanced chemical vapor deposition; ring resonator; silicon chip; silicon nitride-silicon dioxide waveguide; Chemical vapor deposition; Nonlinear optics; Optical films; Optical ring resonators; Optical waveguides; Plasma applications; Plasma waves; Resonance; Silicon compounds; Waveguide discontinuities; (130.3130) Integrated optics materials; (130.3990) Micro-optical devices;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
