Title :
Micro-structuring of SiO/sub 2/ thin film on Si by a femto-second laser pulse
Author :
Kawamura, K. ; Ito, N. ; Hirano, M. ; Hosono, H.
Author_Institution :
Hosono Transparent Electro-Active Mater. (TEAM) Project, Japan Sci. & Technol. Corp., Kawasaki, Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
In this paper report that micro-grating structures are holographically encoded in SiO/sub 2/ thin films on Si by colliding a pair of pulses split from a single high peak power fs-laser pulse using a Ti:sapphire laser.
Keywords :
holographic gratings; laser beam machining; micro-optics; micromachining; optical fabrication; optical films; silicon compounds; Si; Si substrate; SiO/sub 2/; SiO/sub 2/ thin film; femtosecond laser pulse; holographic encoding; micro-grating structure; Amorphous materials; Etching; Gratings; Holography; Optical films; Optical materials; Optical pulses; Pulse amplifiers; Semiconductor thin films; Ultrafast optics;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984146
