DocumentCode :
2250328
Title :
Chemical beam epitaxy of CoGa on GaAs using GaEt3 and CpCo(CO)2 as dual organometallic sources
Author :
Viguier, N. ; Maury, F.
Author_Institution :
Lab. de Cristallochimie, Ractive et Protection des Mater., CNRS, Toulouse, France
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
158
Lastpage :
160
Abstract :
We have investigated for the first time the epitaxial growth of CoGa thin films on (100)GaAs using the separate sources CpCo(CO)/sub 2/ and GaEt/sub 3/ by chemical beam epitaxy (CBE), also called metalorganic molecular beam epitaxy (MOMBE). The gallium source GaEt/sub 3/ was preferred to GaMe/sub 3/ because it is known to be thermally less stable and it induces less carbon contamination in the films grown under reduce pressure. The compound CpCo(CO)/sub 2/ was selected because it is a volatile liquid which has a decomposition temperature range compatible with GaEt/sub 3/.
Keywords :
chemical beam epitaxial growth; cobalt alloys; gallium compounds; metallic epitaxial layers; (100)GaAs substrate; CoGa; CoGa thin film; CpCo(CO)/sub 2/; GaAs; GaEt/sub 3/; chemical beam epitaxy; dual organometallic source; epitaxial growth; metalorganic molecular beam epitaxy; Chemicals; Epitaxial growth; Gallium arsenide; III-V semiconductor materials; Intermetallic; Lattices; Metallization; Molecular beam epitaxial growth; Temperature distribution; Thermal stability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1997.621100
Filename :
621100
Link To Document :
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