Title :
Field emission from nano-protrusion fabricated using nano-stamp technique
Author :
Baba, A. ; Tsubaki, K. ; Asano, T.
Author_Institution :
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
In this paper, we report the fabrication of aligned nano-protrusion using a nano-stamp technique. The field emission characteristic from the nano-protrusion array also reports.
Keywords :
electron field emission; nanotechnology; fabrication; field emission; nano-protrusion array; nano-stamp technique; Current density; Electron emission; Fabrication; Field emitter arrays; Microelectronics; Organic materials; Polyimides; Resins; Resists; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984157
