Title :
Debris characteristics of a laser-produced plasma extreme ultraviolet emission source using a colloidal tin dioxide nano-particle jet target
Author :
Kaku, Masanori ; Suetake, Sumiyoshi ; Senba, Yusuke ; Sato, Yusuke ; Katto, Masahito ; Kubodera, Shoichi
Author_Institution :
Dept. of Electr. & Electron. Eng. & Photon Sci. Center, Univ. of Miyazaki, Miyazaki
Abstract :
Characteristics of emitted particles from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated. By using double laser pulses, the EUV conversion efficiency at 13.5 nm and the ion energy were simultaneously regulated. Deposited amount of tin oxide was not well controlled, however.
Keywords :
colloids; nanoparticles; plasma jets; plasma production by laser; tin compounds; ultraviolet sources; EUV conversion efficiency; SnO; colloidal tin dioxide nanoparticle jet; debris characteristics; extreme ultraviolet emission source; laser-produced plasma; wavelength 13.5 nm; Delay; Laser modes; Optical materials; Optical pulses; Plasma properties; Plasma sources; Pulsed laser deposition; Surface emitting lasers; Tin; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391695
