DocumentCode
2251026
Title
Debris characteristics of a laser-produced plasma extreme ultraviolet emission source using a colloidal tin dioxide nano-particle jet target
Author
Kaku, Masanori ; Suetake, Sumiyoshi ; Senba, Yusuke ; Sato, Yusuke ; Katto, Masahito ; Kubodera, Shoichi
Author_Institution
Dept. of Electr. & Electron. Eng. & Photon Sci. Center, Univ. of Miyazaki, Miyazaki
fYear
2007
fDate
26-31 Aug. 2007
Firstpage
1
Lastpage
2
Abstract
Characteristics of emitted particles from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated. By using double laser pulses, the EUV conversion efficiency at 13.5 nm and the ion energy were simultaneously regulated. Deposited amount of tin oxide was not well controlled, however.
Keywords
colloids; nanoparticles; plasma jets; plasma production by laser; tin compounds; ultraviolet sources; EUV conversion efficiency; SnO; colloidal tin dioxide nanoparticle jet; debris characteristics; extreme ultraviolet emission source; laser-produced plasma; wavelength 13.5 nm; Delay; Laser modes; Optical materials; Optical pulses; Plasma properties; Plasma sources; Pulsed laser deposition; Surface emitting lasers; Tin; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location
Seoul
Print_ISBN
978-1-4244-1173-3
Electronic_ISBN
978-1-4244-1174-0
Type
conf
DOI
10.1109/CLEOPR.2007.4391695
Filename
4391695
Link To Document